机读格式显示(MARC)

• 000 00616cam a2200193 a 4500

• 001 0000846352

• 005 20251215151400.0

• 008 050214s2005 ne f b 001 0 eng

• 020 __ |a 0444516166

• 040 __ |a UKM |c UKM |d OHX |d BAKER |d TEF |d IXA

• 050 _4 |a TK7875 |b .B36 2005

• 090 __ |a TN40/X1

• 093 __ |a TN40 |2 5

• 100 1_ |a Bao, Min-Hang.

• 245 10 |a Analysis and design principles of MEMS devices / |c by Minhang Bao.

• 260 __ |a Amsterdam ; |a San Diego : |b Elsevier, |c 2005.

• 300 __ |a xii, 312 p. : |b ill. ; |c 25 cm.

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Microelectromechanical systems.