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• 000 01621pam a2200301 i 4500

• 001 0000838384

• 005 20250906095800.0

• 008 140804s2015 flua b 001 0 eng c

• 010 __ |a 2014016456

• 020 __ |a 9781482222050 (hardback)

• 040 __ |a OU/DLC |b eng |e rda |c OSU |d DLC |d BTCTA |d YDXCP |d OCLCO |d UKMGB |d NhCcYBP

• 042 __ |a pcc

• 050 00 |a TA2020 |b .M35 2015

• 082 00 |a 621.044 |2 23

• 090 __ |a O539/X2=2

• 093 __ |a O539 |2 5

• 100 1_ |a Makabe, T. |q (Toshiaki), |e author.

• 245 10 |a Plasma electronics : |b applications in microelectronic device fabrication / |c Toshiaki Makabe, Zoran Lj. Petrovic.

• 250 __ |a Second edition.

• 260 __ |a Boca Raton, FL : |b CRC Press, Taylor & Francis Group, |c [2015]

• 300 __ |a xxxv, 376 pages : |b illustrations ; |c 24 cm.

• 336 __ |a text |2 rdacontent.

• 337 __ |a unmediated |2 rdamedia.

• 338 __ |a volume |2 rdacarrier.

• 504 __ |a Includes bibliographical references and index.

• 505 0_ |a Phenomenological description of the charged particle transport -- Macroscopic plasma characteristics -- Elementary processes in gas phase and on surfaces -- The Boltzmann equation and transport equations of charged particles -- General properties of charged particle transport in gases -- Phenomenological description of the charged particle transport -- Phenomenological description of the charged particle transport -- Capacitively coupled plasma -- Inductively coupled plasma -- Magnetically enhanced plasma -- Plasma processing and related topics -- Atmospheric pressure, low temperature plasma.

• 650 _0 |a Plasma engineering.

• 700 1_ |a Petrovic, Z., |e author.