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• 000 01557cam a2200349 i 4500

• 001 0000838662

• 005 20250906085200.0

• 008 170117s2016 waua b 101 0 eng d

• 016 7_ |a 018180441 |2 Uk

• 020 __ |a 9781510602953 |q (paperback)

• 020 __ |a 151060295X

• 020 __ |z 9781510602960 |q (electronic)

• 040 __ |a UKMGB |b eng |e rda |c UKMGB |d OCLCQ |d UKMGB |d OCLCO |d OCLCQ |d OCLCL |d OCLCQ |d OCLCL

• 082 04 |a 600 |q OCoLC |2 23/eng/20230216

• 090 __ |a R122.508/X1

• 093 __ |a R122.508 |2 5

• 111 2_ |a Systems Contamination: Prediction, Control, and Performance (Conference) |d (2016 : |c San Diego, Calif.)

• 245 10 |a Systems Contamination: Prediction, Control, and Performance 2016 : |b 31 August-1 September 2016, 31 August-1 September 2016 San Diego, California, United States / |c Joanne Egges, Carlos E. Soares, Eve M. Wooldridge, Editors.

• 260 __ |a Bellingham, Wash. : |b SPIE, |c 2016.

• 300 __ |a 1 volume (various pagings) : |b illustrations (black and white) ; |c 28 cm

• 336 __ |a text |b txt |2 rdacontent

• 337 __ |a unmediated |b n |2 rdamedia

• 338 __ |a volume |b nc |2 rdacarrier

• 490 0_ |a Proceedings of SPIE, |x 0277-786X ; |v volume 9952

• 500 __ |a SPIE. OPTICS + PHOTONICS.

• 504 __ |a Includes bibliographical references and author index.

• 530 __ |a Also published electronically.

• 650 _0 |a Surface contamination |v Congresses.

• 700 1_ |a Egges, Joanne, |e editor.

• 700 1_ |a Soares, Carlos E., |e editor.

• 700 1_ |a Wooldridge, Eve M., |e editor.

• 710 2_ |a Society of Photo-optical Instrumentation Engineers, |e publisher.