机读格式显示(MARC)

• 000 01272cam a2200325 i 4500

• 001 0000838672

• 005 20250906085500.0

• 008 180326s2016 waua b 100 0 eng

• 010 __ |a 2017465015

• 020 __ |a 9781510609495 |q (print)

• 020 __ |a 1510609490

• 020 __ |z 9781510609501

• 040 __ |a DLC |b eng |e rda |c DLC

• 042 __ |a pcc

• 050 00 |a TK7875 |b .I545 2016

• 090 __ |a TN4-532/X1

• 093 __ |a TN4-532 |2 5

• 111 2_ |a International Conference on Micro- and Nano-Electronics |d (2016 : |c Zvenigorod, Russia)

• 245 10 |a International Conference on Micro- and Nano-Electronics 2016 : |b 3-7 October 2016, Zvenigorod, Russian Federation / |c Vladimir F. Lukichev, Konstantin V. Rudenko, editors.

• 260 __ |a Bellingham, Washington : |b SPIE, |c [2016]

• 300 __ |a 1 volume (various pagings) : |b illustrations (black and white) ; |c 28 cm.

• 336 __ |a text |b txt |2 rdacontent

• 337 __ |a unmediated |b n |2 rdamedia

• 338 __ |a volume |b nc |2 rdacarrier

• 490 0_ |a Proceedings of SPIE, |x 0277-786X ; |v Volume 10224

• 504 __ |a Includes bibliographical references.

• 650 _0 |a Microelectromechanical systems |v Congresses.

• 650 _0 |a Nanoelectromechanical systems |v Congresses.

• 700 1_ |a Lukichev, V. F., |e editor.

• 710 2_ |a SPIE (Society), |e publisher.