机读格式显示(MARC)

• 000 00828cam a2200253 a 4500

• 001 0000844343

• 003 CAL

• 005 20251108151600.0

• 008 030326s2003 njua b 001 0 eng

• 010 __ |a 2003049661

• 020 __ |a 0471457728 (cloth)

• 040 __ |a DLC |c DLC |d C#P

• 050 00 |a TK7874.76 |b .T86

• 090 __ |a TN47-64/X1

• 093 __ |a TN47-64 |2 5

• 100 1_ |a Tung, Chih-Hang, |d 1963-

• 245 10 |a ULSI semiconductor technology atlas / |c Chih-Hang Tung, George T.T. Sheng, Chih-Yuan Lu.

• 260 __ |a Hoboken, N.J. : |b Wiley-Interscience, |c 2003.

• 300 __ |a xii, 666 p. : |b ill. ; |c 27 cm.

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Integrated circuits |x Ultra large scale integration |v Atlases.

• 650 _0 |a Electron microscopy.

• 700 1_ |a Sheng, George T. T.

• 700 1_ |a Lu, Chih-Yuan, |d 1950-