机读格式显示(MARC)

• 000 00571cam a2200181 a 4500

• 001 0000840165

• 005 20251107145400.0

• 008 090513s2009 gw a 000 0 eng d

• 020 __ |a 9783527315505 (set)

• 040 __ |a BTCTA |c BTCTA |d EUN |d HUA |d SCT

• 090 __ |a TB/X6

• 093 __ |a TB |2 5

• 245 00 |a Micro process engineering : |b a comprehensive handbook / |c edited by Volker Hessel ... [et al.].

• 260 __ |a Weinheim : |b Wiley-VCH, |c 2009.

• 300 __ |a 1424 p. : |b ill. (some col.) ; |c 25 cm.

• 650 _0 |a Microtechnology.

• 650 _0 |a Production engineering.

• 700 1_ |a Hessel, Volker.