机读格式显示(MARC)
- 000 00825cam a2200265 a 4500
- 008 000518s2001 njua b 001 0 eng
- 040 __ |a DLC |c DLC |d C#P
- 050 00 |a TK7836 |b .Q27 2001
- 082 00 |a 621.3815/2 |2 21
- 100 1_ |a Quirk, Michael, |d 1953- |0 CAL n2005199151# |7 ba0yba0y
- 245 10 |a Semiconductor manufacturing technology / |c Michael Quirk, Julian Serda.
- 260 __ |a Upper Saddle River, N.J. : |b Prentice Hall, |c 2001.
- 300 __ |a xiii, 666 p. : |b ill. ; |c 29 cm.
- 504 __ |a Includes bibliographical references and index.
- 650 _0 |a Electronic industries.
- 650 _0 |a Semiconductors |x Design and construction.