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题名/责任者:

International Conference on Micro- and Nano-Electronics 2016 : 3-7 October 2016, Zvenigorod, Russian Federation / Vladimir F. Lukichev, Konstantin V. Rudenko, editors.

出版发行项:

Bellingham, Washington : SPIE, [2016]

ISBN:

9781510609495

ISBN:

1510609490

载体形态项:

1 volume (various pagings) : illustrations (black and white) ; 28 cm.

丛编说明:

Proceedings of SPIE, 0277-786X ; Volume 10224

会议名称:

International Conference on Micro- and Nano-Electronics (2016 : Zvenigorod, Russia)

附加个人名称:

Lukichev, V. F., editor.

附加团体名称:

SPIE (Society), publisher.

论题主题:

Microelectromechanical systems-Congresses.

论题主题:

Nanoelectromechanical systems-Congresses.

中图法分类号:

TN4-532

书目附注:

Includes bibliographical references.

豆瓣简介：