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题名/责任者:

Plasma electronics : applications in microelectronic device fabrication / Toshiaki Makabe, Zoran Lj. Petrovic.

版本说明:

Second edition.

出版发行项:

Boca Raton, FL : CRC Press, Taylor & Francis Group, [2015]

ISBN:

9781482222050 (hardback)

载体形态项:

xxxv, 376 pages : illustrations ; 24 cm.

个人责任者:

Makabe, T. (Toshiaki), author.

附加个人名称:

Petrovic, Z., author.

论题主题:

Plasma engineering.

中图法分类号:

O539

书目附注:

Includes bibliographical references and index.

内容附注:

Phenomenological description of the charged particle transport -- Macroscopic plasma characteristics -- Elementary processes in gas phase and on surfaces -- The Boltzmann equation and transport equations of charged particles -- General properties of charged particle transport in gases -- Phenomenological description of the charged particle transport -- Phenomenological description of the charged particle transport -- Capacitively coupled plasma -- Inductively coupled plasma -- Magnetically enhanced plasma -- Plasma processing and related topics -- Atmospheric pressure, low temperature plasma.

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